https://phys.org/news/2018-11-scientists-hydrogen-blisters-electronic-devices.html

"The existing methods are aimed at creating single samples of strained nanotubes; this makes them too expensive for industrial applications," said Konstantin Katin, assistant professor at the MEPhI Institute of Nanoengineering in Electronics, Spintronics, and Photonics. "This is why we came up with an alternative designed for large production volumes that involves depositing carbon nanotubes on the supporting wafer pre-implanted with hydrogen and helium ions."

Upon thermal annealing, these ions turn into gas-filled platelets that grow to form a blister on the surface of the wafer, Katin explained. This blister causes the deformation of the nanotube. By changing the temperature, scientists can control the size of the blister and, therefore, the deformation of the nanostructure.