https://www.sciencedaily.com/releases/2018/10/181023150009.htm

The key to making such tiny devices in large quantities lies in a method the team developed for controlling the natural fracturing process of atomically-thin, brittle materials, directing the fracture lines so that they produce miniscule pockets of a predictable size and shape. Embedded inside these pockets are electronic circuits and materials that can collect, record, and output data.

The novel process, called "autoperforation," is described in a paper published today in the journal Nature Materials, by MIT Professor Michael Strano, postdoc Pingwei Liu, graduate student Albert Liu, and eight others at MIT.